Implant doping region  Simulation object
The Implant doping object allows the user to define a region with a doping profile created by ion implantation. The region geometry as well as parameters can be entered.
Screenshot of the implant doping object showing the center, span, and angle of implantation.
NOTE:

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Source
 DOPANT TYPE: The dopant type can be ntype (donors) or ptype (acceptors).
 PEAK CONCENTRATION (1/cm3): Peak value of doping density in 1/cm3.
 SOURCE THETA (deg):The angle of implantation, measured in degrees, with respect to the surface normal axis defined in Geometry tab.
 SOURCE PHI (deg):The angle of implantation, in degrees, rotated about the surface normal axis in a righthand context.
Implant Distribution
 DISTRIBUTION FUNCTION: Analytic function used to describe the dopant distribution profile along the angle of implantation. Options are 1D Gaussian or Pearson IV distribution.
 RANGE (μm): Average depth of ion penetration, equivalent to the mean of the distribution function
 STRAGGLE (μm): Standard deviation of ion penetration around the mean. For a Gaussian distribution, straggle is the distance from peak density (range) where its value is 1/exp(0.5) ~ 0.606 of the peak density.
 SKEWNESS:
 third standardized moment
 active only for the Pearson IV distribution function
 the skewness must satisfy the relation \( 0\leq\gamma_1^2<32 \). A symmetric distribution function has skewness \( \gamma_1 = 0 \)
 KURTOSIS:
 is a measure of the probability of outliers
 fourth standardized moment
 active only for the Pearson IV distribution function
 the kurtosis must satisfy the relation \( \beta_{2}>\frac{39\gamma_1^2+6(\gamma_1^2+4)^{3/2}+48}{32\gamma_1^2} \). The kurtosis must always satisfy \( \beta_2 > 3 \)
 when the kurtosis is not known, \( \beta_2 \simeq 3 + 2.4\gamma_1^2 \) can be used
 LATERAL SCATTER (μm): Standard deviation of dopants in the lateral plane (orthogonal to the source direction). The distribution function is Gaussian.
Right Panel:
The plot shows a 1D profile of the doping in the implant direction as the distribution model parameters are changed.
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 SURFACE NORMAL: X, Y or Z. This is the surface normal of the 2D mask.
 X, Y, Z: The center position of the object
 USE RELATIVE COORDINATES: If this is enabled then the object will use the center or the simulation region as its origin (reference). If disabled then it will use the absolute center (0,0,0) as its origin.
 VERTICES:
 ADD, DELETE: Add, delete vertices
 APPLICABLE DOMAINS: This can be used to limit the volume over which the imported object is applicable.
 SOLID : Select the target solid. The reference geometry is the surfaces that enclose the selected volume if the solid is a 3D shape, or the surface if the solid is a 2D plane.
 DOMAIN : Select the target domain. The reference geometry is the surfaces of the selected domain.
 ALL DOMAINS: The object will be applied to all the available domains.
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