Lumerical's one of the approaches for populating a PDK with accurate compact models is to pre-simulate or measure a wide range of designs and create lookup tables that map each set of results to the corresponding design. The lookup table can then be associated with a specific circuit element as the basis for a compact model within an INTERCONNECT project. This section introduces the script commands and methods to generate and modify lookup tables, the lookup tables can then be used in compact models for properties mapping.
The most common and convenient way to generate and modify lookup tables is to use script commands. The lookup table itself is a .xml file which contains the design parameters and extracted parameters. The following figure shows the usage of lookup tables to map component level simulation results to compact model parameters.